Veeco di-Innova Atomic Probe Microscope


AOS’s Veeco di-Innova APM is equipped with both mechanical contact and tunneling probes. The noise floor on this system is measured to be ~ 0.25 angstrom and is therefore capable of atomic resolution. This system is useful for high resolution surface texture and materials information. The system is equipped with a large area scanner capable of 90 μm x 90 μm coverage and sample size up to 45 mm in diameter.


Vertical Resolution ~0.25 angstroms
Scanners 90 μm x 90 μm, 5 μm x 5 μm
Lateral Resolution ~1 nm
Z Range 10 μm
Probes Contact (constant and tapping), tunneling