Environmental Scanning Electron Microscope


AOS’s FEI XL30 ESEM is a variable-pressure scanning electron microscope which allows for a relatively low vacuum near the sample. Therefore, non-conductive samples can be imaged without adding conductive coatings, such as gold or carbon, while avoiding surface charge build-up and associated e-beam image distortions.

The XL30 includes a top of the line Energy-Dispersive X-ray Spectroscopy (EDX) system from EDAX. This allows for elemental mapping and analysis. The EDX system utilizes a latest generation Silicon Drift Detector (SDD) that allows for quantitative analysis to Boron (atomic number 5) and qualitative to Beryllium (atomic number 4). The EDX can be used in the variable pressure environment.

The XL30 also includes the companion Electron Backscattered Diffraction (EBSD) system from EDAX. The two systems, EDX and EBSD, work in tandem to allow for elemental mapping and crystallographic type and orientation. The lateral resolution for our EBSD is approximately 1 micron.


SEM Specifications

Source Tungsten
Resolution 50,000x
Variable Pressure to 10 mbar

Peltier Stage

RTD Accuracy +/- 0.5° C
Normal Operating Range +/- 20° C from ambient
Maximum Temperature Range -5° to +60° C

Simultaneous EBSD, EDX and SEM Image Data Collection

EDX Specifications

  • APOLLO X Silicon Drift Detector
  • Capable of quantifying elements down to and including Boron
  • Capable of detecting all elements down to Beryllium
  • Resolution of 131 eV or better, measured at MnK, 100,000CPS
  • Peak to background > 10,000:1

EBSD Specifications

  • Orientation Imaging Microscopy, (OIM) XM 4 System for research level EBSD data collection and analysis
  • All seven crystal systems
  • Phase ID and Phase mapping
  • Chi-scan: combined EDX and EBSD analysis
  • Resolution: 1 μm